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Titanium Backing Tubes
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China Mainland
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Titanium Backing Tube
Haohai Metal manufactures a variety of materials of backing tubes including Titanium, Stainless Steel and Copper for most Cylindrical cathodes We offers a patent pending design for custom Backing Tubes for Non-Bonded Targets, such as ITO, AZO and Molybdenum. Standard Backing Tubes can be made for Sprayed, Cast or Bonded Targets.
We manufacture and supplies high precision backing tubes in SS or Ti material for thermal spray and bonded targets, available in 'standard' outer diameter (OD) of 60mm, 75mm, 88mm and 133mm (other sizes and materials may be available upon request) and with the length of 895mm, 1172mm, 1676mm, 1940mm, 2420mm, 3191mm and 3852mm to suit the target.
Titanium backing tubes are our mainly products, widely used in ceramic targe bonding for touch sensor or TFT sputtering applications. Our titanium backing tubes provide outstanding supports for ITO/IGZO/IZO target bonding with excellent composition, strong mechanical property, clean and fine surface of inner and outer diameter.
Chemical Composition
| Standard | Grade | Chemical Composition (wt%) Max | |||||
| N | C | H | Fe | O | Ti | ||
| ASTM B338 ASME SB338 ASTM B861 ASTM B862 | Grade 1 | 0.03 | 0.08 | 0.015 | 0.20 | 0.18 | Balance |
| Grade 2 | 0.03 | 0.08 | 0.015 | 0.3 | 0.25 | ||
Mechanical properties at room temperature
| Standard | Grade | Tensile Strength, min | Yield Strength 0.2% Offset | Elongation in 50.8 mm or 4 D | ||
| ASTM B338 ASME SB338 ASTM B861 ASTM B862 | Ksi | Mpa | Ksi | Mpa | min % | |
| Grade 1 | 35 | 240 | 25 | 170 | 24 | |
| Grade 2 | 50 | 345 | 40 | 275 | 20 | |
Our monolithic cylindrical targets and backing tubes suitable for cylindrical target materials include:
Aluminum (Al)
Chromium (Cr)
Copper (Cu)
Indium (In)
Indium Tin Oxide (ITO)
Molybdenum (Mo)
Nickel Chromium (NiCr)
Nickel Vanadium (NiV)
Niobium (Nb)
Silver (Ag)
Silcon (Si)
Silicon Aluminum (SiAl)
Stainless Steel (SS)
Tin (Sn)
Titanium (Ti)
Titanium Oxide (TiOx)
Zinc (Zn)
Zinc Aluminum (ZnAl)
Zinc Oxide / Aluminum Oxide (AZO)
Zirconium (Zr)
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